Readout Techniques for High-Q Micromachined Vibratory Rate Gyroscopes
نویسندگان
چکیده
Readout Techniques for High-Q Micromachined Vibratory Rate Gyroscopes
منابع مشابه
Closed-Loop Compensation of the Quadrature Error in MEMS Vibratory Gyroscopes
In this paper, a simple but effective method for compensation of the quadrature error in MEMS vibratory gyroscope is provided. The proposed method does not require any change in the sensor structure, or additional circuit in the feedback path. The mathematical relations of the proposed feedback readout system were analyzed and the proposed solution assures good rejection capabilities. Based on ...
متن کاملEffect of Axial Force on the Performance of Micromachined Vibratory Rate Gyroscopes
It is reported in the published literature that the resonant frequency of a silicon micromachined gyroscope decreases linearly with increasing temperature. However, when the axial force is considerable, the resonant frequency might increase as the temperature increases. The axial force is mainly induced by thermal stress due to the mismatch between the thermal expansion coefficients of the stru...
متن کاملA substrate energy dissipation mechanism in in-phase and anti-phase micromachined z-axis vibratory gyroscopes
This paper analyzes energy dissipation mechanisms in vacuum-operated in-phase and anti-phase actuated micromachined z-axis vibratory gyroscopes. The type of actuation is experimentally identified as the key factor to energy dissipation. For in-phase devices, dissipation through the die substrate is the dominant energy loss mechanism. This damping mechanism depends strongly on the die attachment...
متن کاملA Mode-Matching ΔΣ Closed-Loop Vibratory-Gyroscope Readout Interface with a 0.004°/s/√Hz Noise Floor over a 50Hz Band
As micromachined vibratory gyroscopes push to lower noise floors, mode matching is necessary to moderate interface power dissipation. Mode matching increases sense displacements by the sense mode quality factor and thereby relaxes the precision requirements of the front-end, but also creates several difficulties as evidenced in a recent work [1]. Because it uses mode matching with open-loop sen...
متن کاملModeling and Simulation of Micromachined Gyroscopes in The Presence of Imperfections
This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition [1] is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion on fractions which are changing in di erent time scales. The approach allows rapid simulation of the long-term response of the gyroscope in presence of imperfect...
متن کامل